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Chemistry and Lithography by Uzodinma Okoroanyanwu 9781118030028

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Description

This book provides a comprehensive treatment of the chemical phenomena in lithography in a manner that is accessible to a wide readership. The book presents topics on the optical and charged particle physics practiced in lithography, with a broader view of how the marriage between chemistry and optics has made possible the print and electronic revolutions of the digital age. The related aspects of lithography are thematically presented to convey a unified view of the developments in the field over time. This book is a useful reference for anyone working in the semiconductor industry.

Book Information
ISBN 9781118030028
Author Uzodinma Okoroanyanwu
Format Hardback
Page Count 892
Imprint John Wiley & Sons Inc
Publisher John Wiley & Sons Inc
Weight(grams) 1890g

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