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An Introduction to Surface-Micromachining by Robert William Johnstone 9781402080203
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An Introduction to Surface-Micromachining by Robert William Johnstone 9781402080203

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Description

An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An Introduction to Surface-Micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function.
This book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining.

Book Information
ISBN 9781402080203
Author Robert W. Johnstone
Format Hardback
Page Count 189
Imprint Springer-Verlag New York Inc.
Publisher Springer-Verlag New York Inc.

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