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An Introduction to Microelectromechanical Systems Engineering by Nadim Maluf 9781580535908
Booksplease Price: £80.05MEMS (microelectromechanical systems) technology makes possible the production of miniature devices and systems that stand to revolutionize industrial, optical, medical and electronic markets... -
An Introduction to Microelectromechanical Systems Engineering by Nadim Maluf 9780890065815
Booksplease Price: £68.24A non-technical introduction to the field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS - including silicon, polymers and glass and quartz...