This reference book concentrates on microstructuring surfaces of optical materials with directed fluxes of off-electrode plasma generated by high-voltage gas discharge and developing methods and equipment related to this technique. It covers theoretical and experimental studies on the electrical and physical properties of high-voltage gas discharges used to generate plasma outside an electrode gap. A new class of methods and devices that makes it possible to implement a series of processes for fabricating diffraction microstructures on large format wafers is also discussed.

Book Information
ISBN 9780367886264
Author Nikolay L. Kazanskiy
Format Paperback
Page Count 211
Imprint CRC Press
Publisher Taylor & Francis Ltd
Weight(grams) 650g