Description
By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate.
This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter.
Additional Information:
Visiting http://www.lithoguru.com/textbook/index.html enhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB (R), to accompany the textbook. You can also contact the author and find help for instructors.
About the Author
Chris A. Mack, Vice-President of Lithography Technology, Lithoguru.com.
Book Information
ISBN 9780470727300
Author Chris Mack
Format Paperback
Page Count 544
Imprint John Wiley & Sons Inc
Publisher John Wiley & Sons Inc
Weight(grams) 992g
Dimensions(mm) 244mm * 170mm * 31mm
