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EUV Lithography by Vivek Bakshi
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EUV Lithography by Vivek Bakshi

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9780470471555
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Description

EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.

Book Information
ISBN 9780470471555
Author Vivek Bakshi
Format Hardback
Page Count 702
Imprint John Wiley & Sons Inc
Publisher John Wiley & Sons Inc
Weight(grams) 1592g

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