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Chemistry of Atomic Layer Deposition by Sean Thomas Barry 9783110712513
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Chemistry of Atomic Layer Deposition by Sean Thomas Barry 9783110712513

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Description

This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.



About the Author

Sean Thomas Barry, Carleton University, Ottawa, Canada.




Book Information
ISBN 9783110712513
Author Sean Thomas Barry
Format Paperback
Page Count 113
Imprint De Gruyter
Publisher De Gruyter
Weight(grams) 214g

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