Silicon carbide (SiC) has been described as a suitable semiconductor material to use in MEMS and electronic devices for harsh environments. In recent years, many developments in SiC technology as bulk growth, materials processing, electronic devices and sensors have been shown. Moreover, some studies show the synthesis, characterisation and processing of crystalline SiC films. However, few works have investigated the potential of amorphous silicon carbide (a-SiC) thin films for sensors applications. This book presents fundamentals of amorphous silicon carbide thin films and their applications in piezoresistive sensors for high temperature applications.

Book Information
ISBN 9781613247747
Author Mariana Amorim Fraga
Format Paperback
Page Count 118
Imprint Nova Science Publishers Inc
Publisher Nova Science Publishers Inc
Weight(grams) 198g