Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well as exercises and design challenges at the end of every chapter. Solutions to the design challenge problems are provided online.

Get the hands-on experience needed to design, fabricate and test MEMS devices with this practical guide for students and professionals.

About the Author
Joel Kubby is a Professor of Electrical Engineering in the Baskin School of Engineering at the University of California, Santa Cruz. Prior to this, he was an Area Manager with the Xerox Wilson Center for Research and Technology and a Member of Technical Staff at the Webster Research Center in Rochester, New York. He has led a six-company industrial research consortium under the National Institute of Standards and Technology's Advanced Technology Program (ATP) to develop a new process for optical MEMS, and he has over 80 patents.


Book Information
ISBN 9781107645790
Author Joel A. Kubby
Format Paperback
Page Count 178
Imprint Cambridge University Press
Publisher Cambridge University Press
Weight(grams) 320g
Dimensions(mm) 228mm * 151mm * 9mm